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SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 29 September 2015)] Scanning Microscopies 2015 - SPM metrological assurance using a heterodyne interferometer
Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Kazieva, T. V., Kuznetsov, A. P., Gubskiy, K. L., Reshetov, V. N., Ponarina, M. V., Antonov, A. S., Useinov, A. S.Volume:
9636
Year:
2015
Language:
english
DOI:
10.1117/12.2199874
File:
PDF, 910 KB
english, 2015