Synthesis of highly conductive boron-doped p-type...

Synthesis of highly conductive boron-doped p-type hydrogenated microcrystalline silicon (μc-Si:H) by a hot-wire chemical vapor deposition (HWCVD) technique

S.R Jadkar, Jaydeep V Sali, M.G Takwale, D.V Musale, S.T Kshirsagar
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Volume:
64
Year:
2000
Language:
english
Pages:
14
DOI:
10.1016/s0927-0248(00)00219-1
File:
PDF, 312 KB
english, 2000
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