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Influence of an ammonia activation prior to the PECVD SiN deposition on the solar cell performance
Alexander Hauser, Markus Spiegel, Peter Fath, Ernst BucherVolume:
75
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0927-0248(02)00180-0
File:
PDF, 320 KB
english, 2003