The effect of substrate temperature on P-CVD deposited a-SiGe : H films
Abduljabbar Rashad, Jaydeep V. Sali, B.R. Marathe, M.G. Takwale, A.D. ShaligramVolume:
57
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0927-0248(98)00147-0
File:
PDF, 109 KB
english, 1999