[IEEE 2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - Glasgow, United Kingdom (2015.6.29-2015.7.2)] 2015 11th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - Conductive reliability modelling of capacitive MEMS
Giounanlis, Panagiotis, McGlynn, Peter, Blokhina, Elena, Feely, Orla, Papaioannou, GeorgeYear:
2015
Language:
english
DOI:
10.1109/PRIME.2015.7251397
File:
PDF, 621 KB
english, 2015