Mechanical Deformation Analysis and High-Precision Control...

IEEE/ASME Transactions on Mechatronics 2015 / 4 Vol. 20; Iss. 2

Mechanical Deformation Analysis and High-Precision Control for Ball-Screw-Driven Stages

Zhu, Hongzhong, Fujimoto, Hiroshi
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Volume:
20
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2014.2337933
Date:
April, 2015
File:
PDF, 1.60 MB
english, 2015
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