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SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Advances in Metrology for X-Ray and EUV Optics - Advanced metrology: an essential support for the surface finishing of high performance x-ray optics
Siewert, Frank, Lammert, Heiner, Noll, Tino, Schlegel, Thomas, Zeschke, Thomas, Hänsel, Thomas, Nickel, Andreas, Schindler, Axel, Grubert, Bernd, Schlewitt, Carsten, Assoufid, Lahsen, Takacs, Peter Z.Volume:
5921
Year:
2005
Language:
english
DOI:
10.1117/12.622747
File:
PDF, 769 KB
english, 2005