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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - New procedures for the adjustment of elliptically bent mirrors with the long trace profiler
McKinney, Wayne R., Irick, Steven C., Kirschman, Jonathan L., MacDowell, Alastair A., Warwick, Tony, Yashchuk, Valeriy V., Assoufid, Lahsen, Takacs, Peter Z., Ohtsuka, MasaruVolume:
6704
Year:
2007
Language:
english
DOI:
10.1117/12.736860
File:
PDF, 764 KB
english, 2007