Synthesis of thin tantalum films by magnetron sputtering

Journal of Communications Technology and Electronics 2015 / 12 Vol. 60; Iss. 12

Synthesis of thin tantalum films by magnetron sputtering

Luzanov, V. A., Vedeneev, A. S., Ryl’kov, V. V., Temiryazeva, M. P., Kozlov, A. M., Dukhnovskii, M. P., Bugaev, A. S.
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Volume:
60
Language:
english
Journal:
Journal of Communications Technology and Electronics
DOI:
10.1134/S1064226915110133
Date:
December, 2015
File:
PDF, 230 KB
english, 2015
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