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Stepwise adsorption of a long trichlorosilane and a short aminosilane
Bo Wu, Guangzhao Mao, K.Y.Simon NgVolume:
162
Year:
2000
Language:
english
Pages:
11
DOI:
10.1016/s0927-7757(99)00240-x
File:
PDF, 324 KB
english, 2000