MIM, FEM and experimental investigations of the thermal...

Applied Thermal Engineering 2016 / 02 Vol. 94

MIM, FEM and experimental investigations of the thermal drift in an ultra-high precision set-up for dimensional metrology at the nanometre accuracy level

Bouderbala, Kamélia, Nouira, Hichem, Videcoq, Etienne, Girault, Manuel, Petit, Daniel
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Volume:
94
Language:
english
Journal:
Applied Thermal Engineering
DOI:
10.1016/j.applthermaleng.2015.09.092
Date:
February, 2016
File:
PDF, 3.41 MB
english, 2016
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