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Residual stress and texture in Aluminum doped Zinc Oxide layers deposited by reactive radio frequency magnetron sputtering
Azanza Ricardo, C.L., Pastorelli, M., D'Incau, M., Aswath, P., Scardi, P.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.11.086
Date:
December, 2015
File:
PDF, 1.44 MB
english, 2015