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Fabrication of microlens in photosensitive hybrid sol–gel films using a gray scale mask
Hongjin Jiang, Xiaocong Yuan, Zhisheng Yun, Yuen-Chuen Chan, Yee-Loy LamVolume:
16
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0928-4931(01)00282-x
File:
PDF, 97 KB
english, 2001