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Amorphous molecular materials: development of novel negative electron-beam molecular resists
Toshiaki Kadota, Hiroshi Kageyama, Fujio Wakaya, Kenji Gamo, Yasuhiko ShirotaVolume:
16
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0928-4931(01)00301-0
File:
PDF, 117 KB
english, 2001