Nanoimprint lithography: an alternative nanofabrication approach
C.M. Sotomayor Torres, S. Zankovych, J. Seekamp, A.P. Kam, C. Clavijo Cedeño, T. Hoffmann, J. Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M.V. Maximov, B. HeidariVolume:
23
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0928-4931(02)00221-7
File:
PDF, 588 KB
english, 2003