Time-resolved curling-probe measurements of electron density in high frequency pulsed DC discharges
Pandey, Anil, Sakakibara, Wataru, Matsuoka, Hiroyuki, Nakamura, Keiji, Sugai, HideoVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.016101
Date:
January, 2016
File:
PDF, 2.52 MB
english, 2016