High-rate reactive high-power impulse magnetron sputtering...

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Surface and Coatings Technology 2015 / 8

High-rate reactive high-power impulse magnetron sputtering of hard and optically transparent HfO2 films

Vlček, J., Belosludtsev, A., Rezek, J., Houška, J., Čapek, J., Čerstvý, R., Haviar, S.
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2015.08.024
Date:
August, 2015
File:
PDF, 1.43 MB
english, 2015
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