Bonding of copper surface in ambient air using propylene...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 09 Vol. 14; Iss. 3

Bonding of copper surface in ambient air using propylene carbonate as passivation layer

Zhu, Zhiyuan, Yu, Min, Phillips, Oluwadamilola, Liu, Lisha, Jin, Yufeng
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.034504
Date:
September, 2015
File:
PDF, 1.87 MB
english, 2015
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