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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films
Sánchez-Rojas, José Luis, Brama, Riccardo, Rittinger, Johannes, Taptimthong, Piriya, Jogschies, Lisa, Wurz, Marc C., Rissing, LutzVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2178765
File:
PDF, 1.22 MB
english, 2015