ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - ALD TaN from PDMAT in TSV Architectures
Brizé, Virginie, Artaud, Laurent, Berthomé, Grégory, Boichot, Raphaël, Daniele, Stéphane, Nuta, Ioana, Mantoux, Arnaud, Blanquet, ElisabethYear:
2010
Language:
english
DOI:
10.1149/1.3485255
File:
PDF, 667 KB
english, 2010