ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - 248nm Process Is Capable for sub 0.09 um Groundrules
Wang, Lei, Guo, Xiaobo, Tong, Yufeng, Meng, Honglin, Su, Bo, Xiao, Shen'anYear:
2011
Language:
english
DOI:
10.1149/1.3567593
File:
PDF, 426 KB
english, 2011