An Approach for Correlating Friction Force and Removal Rate to Pad Topography during Tungsten Chemical Mechanical Planarization
Sampurno, Yasa, Rice, Adam, Zhuang, Yun, Philipossian, AraVolume:
14
Year:
2011
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3589984
File:
PDF, 1.67 MB
english, 2011