![](/img/cover-not-exists.png)
Competitive Interaction between Segregation Gettering and Surface Precipitation of Nickel in p / p + Silicon Epitaxial Wafers
Torigoe, Kazuhisa, Ono, Toshiaki, Nakamura, KozoVolume:
4
Year:
2015
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0201509jss
File:
PDF, 686 KB
english, 2015