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Critical evaluation of the state of the art of the analysis of light elements in thin films demonstrated using the examples of SiOXNY and AlOXNY films (IUPAC Technical Report)
Dreer, Sabine, Wilhartitz, P.Volume:
76
Language:
english
Journal:
Pure and Applied Chemistry
DOI:
10.1351/pac200476061161
Date:
January, 2004
File:
PDF, 460 KB
english, 2004