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Layered nano-gratings by electron beam writing to form 3-level diffractive optical elements for 3D phase-offset holographic lithography
Yuan, Liang (Leon), Herman, Peter R.Volume:
7
Year:
2015
Language:
english
Journal:
Nanoscale
DOI:
10.1039/C5NR06822C
File:
PDF, 8.09 MB
english, 2015