Monitoring wafers’ geometric quality using an additive...

IIE Transactions 2016 / 01 Vol. 48; Iss. 1

Monitoring wafers’ geometric quality using an additive Gaussian process model

Zhang, Linmiao, Wang, Kaibo, Chen, Nan
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Volume:
48
Language:
english
Journal:
IIE Transactions
DOI:
10.1080/0740817X.2015.1027455
Date:
January, 2016
File:
PDF, 1.78 MB
english, 2016
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