Modeling and analysis of MEMS capacitive differential...

Microsystem Technologies 2017 / 5 Vol. 23; Iss. 5

Modeling and analysis of MEMS capacitive differential pressure sensor structure for altimeter application

Parthasarathy, Eswaran, S, Malarvizhi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2756-4
Date:
May, 2017
File:
PDF, 1.40 MB
english, 2017
Conversion to is in progress
Conversion to is failed