A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Journal of Microelectromechanical Systems 2015 / 12 Vol. 24; Iss. 6

A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Krijnen, Bram, Swinkels, Koen R., Brouwer, Dannis M., Abelmann, Leon, Herder, Just L.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2432054
Date:
December, 2015
File:
PDF, 5.17 MB
english, 2015
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