SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Spin on glass (SOG)-based planarization scheme compatible with a stacked via multilevel metal process
Bacchetta, Maurizio, Bacci, Laura, Iazzi, Nadia, Liles, I., Zanotti, Luca, Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, BarbaraVolume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156534
File:
PDF, 977 KB
english, 1993