Piezoelectric effect in RF sputtered ferroelectric thin...

Piezoelectric effect in RF sputtered ferroelectric thin films

D Czekaj, Z Surowiak, A.A Bakirov, V.P Dudkievich
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Volume:
21
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0955-2219(01)00076-0
File:
PDF, 177 KB
english, 2001
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