Site-selective deposition and micropatterning of tantalum...

Site-selective deposition and micropatterning of tantalum oxide thin films using a monolayer

Yoshitake Masuda, Shinichi Wakamatsu, Kunihito Koumoto
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/s0955-2219(03)00230-9
File:
PDF, 583 KB
english, 2004
Conversion to is in progress
Conversion to is failed