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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
Kruusing, Arvi, Leppaevuori, Seppo, Uusimaki, Antti, Uusimaki, Matti, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341285
File:
PDF, 3.79 MB
english, 1999