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SPIE Proceedings [SPIE Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments - Beijing, China (Wednesday 8 November 2000)] Optical Measurement and Nondestructive Testing: Techniques and Applications - Diffraction analysis and evaluation of a focus-error detection scheme for an optical profilometer
Yang, Chunlan, Pu, Zhaobang, Zhao, Huijie, Song, FeiJun, Chen, Frank, Hung, Michael Y.Y., Shang, H.M.Volume:
4221
Year:
2000
Language:
english
DOI:
10.1117/12.402613
File:
PDF, 143 KB
english, 2000