SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - Experimental and simulation investigations of acoustic cavitation in megasonic cleaning
Muralidharan, Krishna, Keswani, Manish, Shende, Hrishikesh, Deymier, Pierre, Raghavan, Srini, Eschbach, Florence, Sengupta, Archita, Lercel, Michael J.Volume:
6517
Year:
2007
Language:
english
DOI:
10.1117/12.712464
File:
PDF, 464 KB
english, 2007