Active damping within an advanced microlithography system...

Active damping within an advanced microlithography system using piezoelectric Smart Discs

Jan Holterman, Theo J.A. de Vries
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Volume:
14
Year:
2004
Language:
english
Pages:
20
DOI:
10.1016/s0957-4158(02)00093-4
File:
PDF, 706 KB
english, 2004
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