![](/img/cover-not-exists.png)
Active damping within an advanced microlithography system using piezoelectric Smart Discs
Jan Holterman, Theo J.A. de VriesVolume:
14
Year:
2004
Language:
english
Pages:
20
DOI:
10.1016/s0957-4158(02)00093-4
File:
PDF, 706 KB
english, 2004