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A pressure transducer with a single-sided multilevel structure by maskless etching technology
Heng Yang, Shaoqun Shen, Minhang Baoa, Jianjun Ren, Jiaying Shen, Deren LuVolume:
8
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0957-4158(98)00010-5
File:
PDF, 311 KB
english, 1998