Size effect on the dynamic analysis of electrostatically...

Microsystem Technologies 2017 / 5 Vol. 23; Iss. 5

Size effect on the dynamic analysis of electrostatically actuated micro-actuators

Peng, J. S., Yang, L., Yang, J.
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2788-9
Date:
May, 2017
File:
PDF, 712 KB
english, 2017
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