SPIE Proceedings [SPIE 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014) - Harbin, China (Saturday 26 April 2014)] 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - A novel measuring device for step gauge
Ye, Tianchun, Poleshchuk, A. G., Hu, Song, Sun, Shuanghua, Shen, Xueping, Zou, Lingding, Gao, Hongtang, Ye, XiaoyouVolume:
9283
Year:
2014
Language:
english
DOI:
10.1117/12.2069753
File:
PDF, 355 KB
english, 2014