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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, CA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Uniformity-aware standard cell design with accurate shape control
Zhang, Hongbo, Wong, Martin D. F., Chao, Kai-Yuan, Deng, Liang, Choi, Soo-Han, Singh, Vivek K., Rieger, Michael L.Volume:
7275
Year:
2009
Language:
english
DOI:
10.1117/12.814445
File:
PDF, 468 KB
english, 2009