Study of hysteresis behavior in reactive sputtering of...

Chinese Physics B 2015 / 12 Vol. 24; Iss. 12

Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

Kakati, H., Borah, S. M.
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Volume:
24
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/24/12/125201
Date:
December, 2015
File:
PDF, 641 KB
english, 2015
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