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A novel micro/nano fabrication process based on the combined use of dielectrophoresis, electroosmotic flow, and electrodeposition for surface patterning
Perez-Gonzalez, Victor H, Ho, Vinh, Vazquez-Pinon, Matias, Martinez-Chapa, Sergio O, Kulinsky, LawrenceVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/11/115007
Date:
November, 2015
File:
PDF, 2.60 MB
english, 2015