![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] MOEMS and Miniaturized Systems XI - Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Kenda, Andreas, Schenk, Harald, Piyawattanametha, Wibool, Sandner, Thilo, Lüttjohann, Stephan, Noell, Wilfried, Kraft, Martin, Tortschanoff, Andreas, Simon, ArnoVolume:
8252
Year:
2012
Language:
english
DOI:
10.1117/12.908273
File:
PDF, 1.30 MB
english, 2012