Development of InSb dry etch for mid-IR applications

Microelectronic Engineering 2015 / 12

Development of InSb dry etch for mid-IR applications

Pusino, Vincenzo, Xie, Chengzhi, Khalid, Ata, Thayne, Iain G., Cumming, David R.S.
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Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.12.014
Date:
December, 2015
File:
PDF, 856 KB
english, 2015
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