SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Adhesion between PMMA mask layer and silicon wafer in KOH aqueous solution
Ilie, Mihaela, Marculescu, Bogdan, Moldovan, Nicolae, Nastase, Nicoleta, Olteanu, Mihaela, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324086
File:
PDF, 2.31 MB
english, 1998