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Wet-Etching Evaluation Method of Subsurface Damage after Grinding of Glass
Sekiguchi, Rei, Yoshikawa, Shun, Higashi, Kazuhiko, Miki, Norihisa, Kakinuma, Yasuhiro, Fukuta, Masahiko, Tanaka, KatsutoshiVolume:
806
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.806.503
Date:
November, 2015
File:
PDF, 3.36 MB
english, 2015