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Resolution enhancement using pulse width modulation in digital micromirror device-based point-array scanning pattern exposure
Kuo, Hung-Fei, Huang, Yi-JunVolume:
79
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2015.12.002
Date:
April, 2016
File:
PDF, 3.87 MB
english, 2016