A new manufacturing approach for mono-crystalline SiC...

A new manufacturing approach for mono-crystalline SiC wafers

Fabrice Letertre, Bruno Ghyselen, Bernard Aspar
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Volume:
15
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0961-1290(02)85136-5
File:
PDF, 450 KB
english, 2002
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