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Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system
Dai, Wei, Liu, Jingmao, Geng, Dongsen, Guo, Peng, Zheng, Jun, Wang, QiminLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.11.025
Date:
November, 2015
File:
PDF, 2.21 MB
english, 2015