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Three-dimensional nanomasks using block copolymers confined in the nanopores of anodic aluminum oxide templates
Chu, Chiang-Jui, Lin, Chia-Hua, Chung, Pei-Yun, Cheng, Ming-Hsiang, Jeng, Kai-Sheng, Chen, Jiun-TaiVolume:
3
Language:
english
Journal:
Materials Today Communications
DOI:
10.1016/j.mtcomm.2015.04.002
Date:
June, 2015
File:
PDF, 1.25 MB
english, 2015