Shock reliability analysis and improvement of MEMS...

Journal of Micromechanics and Microengineering 2015 / 10 Vol. 25; Iss. 10

Shock reliability analysis and improvement of MEMS electret-based vibration energy harvesters

Renaud, M, Fujita, T, Goedbloed, M, de Nooijer, C, van Schaijk, R
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/10/104010
Date:
October, 2015
File:
PDF, 1.04 MB
english, 2015
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